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Curve committed Mar 17, 2024
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<h1>ViennaPS - Process Simulation Library</h1>

[![Linux](https://github.com/ViennaTools/ViennaPS/actions/workflows/linux_test.yml/badge.svg)](https://github.com/ViennaTools/ViennaPS/actions/workflows/linux_test.yml)
[![macOS](https://github.com/ViennaTools/ViennaPS/actions/workflows/macos_test.yml/badge.svg)](https://github.com/ViennaTools/ViennaPS/actions/workflows/macos_test.yml)
[![Windows](https://github.com/ViennaTools/ViennaPS/actions/workflows/windows_test.yml/badge.svg)](https://github.com/ViennaTools/ViennaPS/actions/workflows/windows_test.yml)
[![🐍 Build Bindings](https://github.com/ViennaTools/ViennaPS/actions/workflows/python.yml/badge.svg)](https://github.com/ViennaTools/ViennaPS/actions/workflows/python.yml)
[![🧪 Run Tests](https://github.com/ViennaTools/ViennaPS/actions/workflows/build.yml/badge.svg)](https://github.com/ViennaTools/ViennaPS/actions/workflows/build.yml)

</div>

Expand Down Expand Up @@ -48,15 +47,12 @@ The CMake configuration automatically checks if the dependencies are installed.
```bash
git clone https://github.com/ViennaTools/ViennaPS.git
cd ViennaPS
mkdir build && cd build
cmake .. -DCMAKE_INSTALL_PREFIX=/path/to/your/custom/install/
make buildDependencies # this will install all dependencies and might take a while
make install
```

This will install the necessary headers and CMake files to the specified path. If `CMAKE_INSTALL_PREFIX` is not specified, it will be installed to the standard path for your system, usually `/usr/local/` .
cmake -B build && cmake --build build
cmake --install build --prefix "/path/to/your/custom/install/"
```

If one wants to use a specific installation of one or more of the dependencies, just pass the corresponding _*_DIR_ variable as a configuration option (e.g. -DViennaLS_DIR=/path/to/viennals/install -DViennaRay_DIR=/path/to/viennaray/install).
This will install the necessary headers and CMake files to the specified path. If `--prefix` is not specified, it will be installed to the standard path for your system, usually `/usr/local/` .

## Building the Python package

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```bash
git clone https://github.com/ViennaTools/ViennaPS.git
cd ViennaPS

pip install --user .
```

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## Integration in CMake projects

In order to use this library in your CMake project, add the following lines to the CMakeLists.txt of your project:
We recommend using [CPM.cmake](https://github.com/cpm-cmake/CPM.cmake) to consume this library.

* Installation with CPM
```cmake
CPMAddPackage("gh:viennatools/viennaps@2.0.0")
```

* With a local installation
> In case you have ViennaPS installed in a custom directory, make sure to properly specify the [`CMAKE_PREFIX_PATH`](https://cmake.org/cmake/help/latest/envvar/CMAKE_PREFIX_PATH.html#envvar:CMAKE_PREFIX_PATH).
```CMake
set(ViennaPS_DIR "/path/to/your/custom/install/")
find_package(ViennaPS REQUIRED)
add_executable(${PROJECT_NAME} ...)
target_include_directories(${PROJECT_NAME} PUBLIC ${VIENNAPS_INCLUDE_DIRS})
target_link_libraries(${PROJECT_NAME} ${VIENNAPS_LIBRARIES})
```
```cmake
list(APPEND CMAKE_PREFIX_PATH "/your/local/installation")
find_package(ViennaPS)
target_link_libraries(${PROJECT_NAME} PUBLIC ViennaTools::ViennaPS)
```

## Basic Examples

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### Trench Deposition

This example focuses on a particle deposition process within a trench geometry. By default, the simulation presents a 2D representation of the trench. Nevertheless, users have the flexibility to conduct 3D simulations by adjusting the value of the constant _D_ in __trenchDeposition.cpp__ to 3. Customization of process and geometry parameters is achieved through the __config.txt__ file. The accompanying image illustrates instances of the trench deposition process, showcasing variations in the particle sticking probability _s_.

<div align="center">
<img src="https://raw.githubusercontent.com/ViennaTools/ViennaPS/master/assets/deposition.svg" width=700 style="background-color:white;">
<img src="assets/deposition.svg" width=700 style="background-color:white;">
</div>

### SF<sub>6</sub>O<sub>2</sub> Hole Etching

This example demonstrates a hole etching process with a SF<sub>6</sub>O<sub>2</sub> plasma etching chemistry with ion bombardment. The process and geometry parameters can be varied in the __config.txt__ file.
Below the results after 10, 20, and 30 seconds of etching are shown.

<div align="center">
<img src="https://raw.githubusercontent.com/ViennaTools/ViennaPS/master/assets/hole_etching.svg" width=700 style="background-color:white;">
<img src="assets/hole_etching.svg" width=700 style="background-color:white;">
</div>

By changing the dimension of the hole etching example (_D = 2_), we can easily simulate the profile of a trench etching process with the same plasma chemistry. Here we can, for example, vary the mask tapering angle to observe increased micro-trenching, as shown below.

<div align="center">
<img src="https://raw.githubusercontent.com/ViennaTools/ViennaPS/master/assets/sidewall_tapering.svg" width=700 style="background-color:white;">
<img src="assets/sidewall_tapering.svg" width=700 style="background-color:white;">
</div>

### Anisotropic Processes

In the anisotropic process model, the etch or deposition rates are dependent on the crystallographic directions of the surface. This enables the accurate modeling of intricate processes like epitaxial growth or anisotropic wet etching. Basic examples, illustrating these processes are provided with the library and shown below.

<div align="center">
<img src="https://raw.githubusercontent.com/ViennaTools/ViennaPS/master/assets/anisotropic_process.svg" width=700 style="background-color:white;">
<img src="assets/anisotropic_process.svg" width=700 style="background-color:white;">
</div>

### Redeposition During Selective Etching

This example demonstrates capturing etching byproducts and the subsequent redeposition during a selective etching process in a Si<sub>3</sub>N<sub>4</sub>/SiO<sub>2</sub> stack. The etching byproducts are captured in a cell set description of the etching plasma. To model the dynamics of these etching byproducts, a convection-diffusion equation is solved on the cell set using finite differences. The redeposition is then captured by adding up the byproducts in every step and using this information to generate a velocity field on the etched surface.

<div align="center">
<img src="https://raw.githubusercontent.com/ViennaTools/ViennaPS/master/assets/redeposition.gif" width=700 style="background-color:white;">
<img src="assets/redeposition.gif" width=700 style="background-color:white;">
</div>

## Tests

ViennaPS uses CTest to run its tests. In order to check whether ViennaPS runs without issues on your system, you can run:
> __Important__: Make sure all dependencies are installed and have been built previously

```bash
mkdir build && cd build
cmake .. -DVIENNAPS_BUILD_TESTS=ON -DCMAKE_BUILD_TYPE=DEBUG
make buildTests
ctest -C Debug
git clone https://github.com/ViennaTools/ViennaPS.git
cd ViennaPS

cmake -B build -DVIENNAPS_BUILD_TESTS=ON
cmake --build build
ctest -E "Benchmark|Performance" --test-dir build
```

## Application

> __Deprecation Warning__: The ViennaPS application is no longer updated with new functionalities added to ViennaPS after release 1.2.0. Please use the Python bindings instead.
> [!WARNING]
> The ViennaPS application is no longer updated with new functionalities added to ViennaPS after release 1.2.0. Please use the Python bindings instead.
It is also possible to build an application which can parse a custom configuration file and execute pre-defined processes. The application can be built using CMake:
> __Important__: Make sure all dependencies are installed and have been built previously

```bash
mkdir build && cd build
cmake .. -DVIENNAPS_BUILD_APPLICATION=ON
make buildApplication
git clone https://github.com/ViennaTools/ViennaPS.git
cd ViennaPS

cmake -B build -DVIENNAPS_BUILD_APPLICATION=ON
cmake --build build
```
This creates 2 executables `ViennaPS2D` and `ViennaPS3D` which run processes in 2 or 3 dimensions respectively. Every configuration file can be run in 2D or 3D mode.

The configuration file must obey a certain structure in order to be parsed correctly. An example for a configuration file can be seen in _SampleConfig.txt_. The configuration file is parsed line by line and each successfully parsed line is executed immediately. A detailed documentation for the configuration file can be found in **app/README.md**.
This creates 2 executables `ViennaPS2D` and `ViennaPS3D` which run processes in 2 or 3 dimensions respectively. Every configuration file can be run in 2D or 3D mode.

The configuration file must obey a certain structure in order to be parsed correctly. An example for a configuration file can be seen in `SampleConfig.txt`. The configuration file is parsed line by line and each successfully parsed line is executed immediately. A detailed documentation for the configuration file can be found in the [app readme](app/README.md).

## Contributing

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