ViennaPS

ViennaPS is a header-only C++ process simulation library, which includes surface and volume representations, a ray tracer, and physical models for the simulation of microelectronic fabrication processes.

IMPORTANT NOTE: ViennaPS is under heavy development and improved daily. If you do have suggestions or find bugs, please let us know!

Releases

Releases are tagged on the master branch and available in the releases section.

Building

Supported Operating Systems

• Windows (Visual Studio)

• Linux (g++ / clang)

• macOS (XCode)

System Requirements

• C++17 Compiler with OpenMP support

Dependencies (installed automatically)

• ViennaLS

• ViennaRay

Installing

The CMake configuration automatically checks if the dependencies are installed. If CMake is unable to find them, the dependencies will be built from source with the buildDependencies target.

git clone https://github.com/ViennaTools/ViennaPS.git
cd ViennaPS
mkdir build && cd build
cmake .. -DCMAKE_INSTALL_PREFIX=/path/to/your/custom/install/
make buildDependencies # this will install all dependencies and might take a while
make install

This will install the necessary headers and CMake files to the specified path. If CMAKE_INSTALL_PREFIX is not specified, it will be installed to the standard path for your system, usually /usr/local/ .

If one wants to use a specific installation of one or more of the dependencies, just pass the corresponding _*DIR variable as a configuration option (e.g. -DViennaLS_DIR=/path/to/viennals/install -DViennaRay_DIR=/path/to/viennaray/install)

Integration in CMake projects

In order to use this library in your CMake project, add the following lines to the CMakeLists.txt of your project:

set(ViennaPS_DIR "/path/to/your/custom/install/")
find_package(ViennaPS REQUIRED)
add_executable(${PROJECT_NAME} ...)
target_include_directories(${PROJECT_NAME} PUBLIC ${VIENNAPS_INCLUDE_DIRS})
target_link_libraries(${PROJECT_NAME} ${VIENNAPS_LIBRARIES})

Basic Examples

Building

The examples can be built using CMake:

Important: Make sure all dependencies are installed and have been built previously

mkdir build && cd build
cmake .. -DVIENNAPS_BUILD_EXAMPLES=ON
make buildExamples

The examples can then be executed in their respective build folders with the config files, e.g.:

cd Examples/ExampleName
./ExampleName config.txt

Individual examples can also be build by calling make in their respective build folder.

Trench Deposition

This example contains a single particle deposition process in a trench geometry. By default, a 2D representation of the trench is simulated. However, 3D simulations are also possible by setting the value of the constant D in TrenchDeposition.cpp to 3. In the config.txt file the process and geometry parameters can be varied. The picture show an example of the trench deposition process for various value of the particle sticking probability s.

SF₆O₂ Hole Etching

This example demonstrates a hole etching process with a SF₆O₂ plasma etching chemistry with ion bombardement. The process and geometry parameters can be varied in the config.txt file. Below the results after 1, 2, and 3 seconds of etching are shown.

By changing the dimension of the hole etching example (D = 2), we can easily simulate the profile of a trench etching process with the same plasma chemistry. Here we can, for example, vary the mask tapering angle to observe increased microtrenching, as shown below.

Redeposition During Selective Etching

This example demonstrates capturing etching byproducts and the subsequent redeposition during a selective etching process in a Si₃N₄/SiO₂ stack. The etching byproducts are captured in a cell set description of the etching plasma. To model the dynamics of these etching byproducts, a convection-diffusion equation is solved on the cell set using finite differences. The redeposition is then captured by adding up the byproducts in every step and using this information to generate a velocity field on the etched surface.

Application

It is also possible to build an application which can parse a custom configuration file and execute pre-defined processes. The application can be built using CMake:

Important: Make sure all dependencies are installed and have been built previously

mkdir build && cd build
cmake .. -DVIENNAPS_BUILD_APPLICATION=ON
make buildApplication

This creates 2 executables ViennaPS2D and ViennaPS3D which run processes in 2 or 3 dimensions respectively. Every configuration file can be run in 2D or 3D mode.

The configuration file must obey a certain structure in order to be parsed correctly. An example for a configuration file can be seen in SampleConfig.txt. The configuration file is parsed line by line and each succesfully parsed line is executed immediately. A detailed documentation for the configuration file can be found in app/README.md.

Contributing

If you want to contribute to ViennaPS, make sure to follow the LLVM Coding guidelines. Before creating a pull request, make sure ALL files have been formatted by clang-format, which can be done using the format-project.sh script in the root directory.

Authors

Current contributors: Tobias Reiter, Julius Piso, Josip Bobinac, Xaver Klemenschits

Contact us via: viennatools@iue.tuwien.ac.at

ViennaPS was developed under the aegis of the 'Institute for Microelectronics' at the 'TU Wien'. http://www.iue.tuwien.ac.at/

License

See file LICENSE in the base directory.